APPARATUS FOR FORMING MATERIAL LAYER ON SUBSTRATE IN MANUFACTURING SOLAR CELL

摘要

PURPOSE: A device for forming material layers on a substrate in manufacturing a solar cell is provided to reduce the time of forming the material layers by forming all material layers with an in-situ method in one device. CONSTITUTION: A first deposition unit forms a first layer including copper on a substrate. A second deposition unit forms a second layer including indium on the first layer. A thermal processing unit(110) forms a light absorption layer on at least one substrate by performing a selenization or sulfurization process on at least one substrate with the first layer and the second layer. A transfer module(150) is arranged between the thermal processing unit and the first and second deposition units and transfers the substrate between the thermal processing unit and the first and second deposition units with an in-situ method.