发明名称 |
METHOD OF FABRICATING SEMICONDUCTOR DEVICE |
摘要 |
<p>PURPOSE: A method for manufacturing a semiconductor device is provided to simplify a semiconductor manufacturing process by simultaneously forming a well ion implantation region and a field stop ion implantation region. CONSTITUTION: A first conductive well is formed on a substrate. A second conductive dopant is implanted into the first conductive well using an ion-implantation mask as an implantation barrier in order to form a second conductive retrograde we. The second conductive dopant is vertically implanted into the substrate to simultaneously form a well ion implantation region(35A) and a field stop ion implantation region(35B).</p> |
申请公布号 |
KR20100074542(A) |
申请公布日期 |
2010.07.02 |
申请号 |
KR20080133014 |
申请日期 |
2008.12.24 |
申请人 |
HYNIX SEMICONDUCTOR INC. |
发明人 |
LEE, JIN KU;OH, JAE GEUN;JU, MIN AE |
分类号 |
H01L21/336;H01L29/78 |
主分类号 |
H01L21/336 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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