发明名称 METHOD OF FABRICATING SEMICONDUCTOR DEVICE
摘要 <p>PURPOSE: A method for manufacturing a semiconductor device is provided to simplify a semiconductor manufacturing process by simultaneously forming a well ion implantation region and a field stop ion implantation region. CONSTITUTION: A first conductive well is formed on a substrate. A second conductive dopant is implanted into the first conductive well using an ion-implantation mask as an implantation barrier in order to form a second conductive retrograde we. The second conductive dopant is vertically implanted into the substrate to simultaneously form a well ion implantation region(35A) and a field stop ion implantation region(35B).</p>
申请公布号 KR20100074542(A) 申请公布日期 2010.07.02
申请号 KR20080133014 申请日期 2008.12.24
申请人 HYNIX SEMICONDUCTOR INC. 发明人 LEE, JIN KU;OH, JAE GEUN;JU, MIN AE
分类号 H01L21/336;H01L29/78 主分类号 H01L21/336
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