PHOTOELECTRIC CONVERSION DEVICE AND MANUFACTURING METHOD THEREOF

摘要

PURPOSE: A photoelectric conversion device and a manufacturing method thereof are provided to increase the efficiency of the photoelectric conversion device by forming a combination electrode on one side of a semiconductor substrate. CONSTITUTION: A semiconductor substrate has a front surface and a rear surface. A protection layer(60) is formed on the front surface of the semiconductor substrate. A first amorphous semiconductor layer(20) is formed on the rear surface of the semiconductor substrate. A first conductive layer(30) is formed on the first region of the rear surface of the first amorphous semiconductor layer and includes a first impurity. A second conductive layer is formed on a second region of the rear surface of the first amorphous semiconductor layer and includes a first impurity and a second impurity. The density of the second impurity is 2 to 10 times than the density of the first impurity.