摘要 |
PURPOSE: A fuse of a semiconductor device and a forming method thereof are provided to reduce the energy of a laser in a blowing process by thinly forming a fuse blowing part. CONSTITUTION: A fuse of a semiconductor device includes a nitride layer, an insulation layer(23), and a fuse(33). The nitride layer is formed on a fuse region. The insulation layer is formed on the fuse blowing part of the nitride layer. The fuse is planarized on the insulation layer and the nitride layer. The fuse blowing part is thinner than the others. The fuse is made of copper.
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