| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an ultrasonic motor which facilitates manufacturing a plate-like piezoelectric element and a vibrator and shows less performance irregularity as a product. <P>SOLUTION: The vertical/torsional vibration type ultrasonic motor includes a vibrator. The vibrator includes a piezoelectric layer portion 4a2 formed by laminating plate-like piezoelectric elements 4a21, a first elastic material 4a1 which includes a first sloped surface making a given angle θ against a surface perpendicular to the direction of lamination and brings the whole of the first sloped surface into contact with one end face of the piezoelectric layer portion 4a2, and a second elastic material 4a1' which includes a second sloped surface parallel with the first sloped surface and brings the whole of the second sloped surface into contact with the other end face of the piezoelectric layer portion 4a2. The piezoelectric element 4a21 includes an electrode film on a surface perpendicular to the outline surface. The piezoelectric layer portion 4a2 includes a through-hole H formed along the direction of lamination of the plate-like piezoelectric elements 4a21, and the first and second elastic materials 4a1 and 4a1' have a through-hole H' formed along a direction perpendicular to a surface making the angle θ against the sloped surfaces. <P>COPYRIGHT: (C)2010,JPO&INPIT |
