| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate fixing device which is suitable to be used at high temperature. SOLUTION: The substrate fixing device has an electrostatic chuck for attracting and holding an object of attraction placed on one surface of a base, and a base plate for supporting the electrostatic chuck, the base and base plate being fixed through only a first columnar member. COPYRIGHT: (C)2010,JPO&INPIT |
