| 摘要 |
PROBLEM TO BE SOLVED: To provide a built-in slider in which the height of a stage is low, and the attitude accuracy and positioning accuracy are good. SOLUTION: A shaft type linear motor is built in the slider 7 of a module, i.e., a stage combining a ball guide mechanism 6 and a linear motor, a moving member yoke 9 for magnetic shield is arranged on the outside of a moving member coil 8 arranged to surround the periphery of a shaft-like stator 3 having a magnet, and the outside of the moving member yoke 9 is covered with nonmagnetic materials 10 and 11. COPYRIGHT: (C)2010,JPO&INPIT |
