发明名称 |
METHOD AND APPARATUS FOR DETECTING AN IDLE MODE OF PROCESSING EQUIPMENT |
摘要 |
Methods and apparatus for detecting an idle mode of processing equipment are provided herein. In some embodiments, an apparatus for monitoring a processing system may include a first system adapter for monitoring a first process chamber and determining a state thereof; and a first support adapter for communicating with the first system adapter and a first support system coupled to the first process chamber, the support adapter configured to communicate a readiness to operate the first support system at a low power mode to a controller of the support system in response to the state of the first process chamber being in an idle mode. |
申请公布号 |
WO2010042660(A3) |
申请公布日期 |
2010.07.01 |
申请号 |
WO2009US59899 |
申请日期 |
2009.10.07 |
申请人 |
APPLIED MATERIALS, INC.;SCHAUER, RONALD VERN |
发明人 |
SCHAUER, RONALD VERN |
分类号 |
H01L21/66 |
主分类号 |
H01L21/66 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|