THE METHOD AND APPARATUS FOR MANUFACTURING SELF-ASSEMBLY MONOLAYER USING EVAPORATION PROCESS

摘要

PURPOSE: A method and an apparatus for manufacturing a self-assembled monolayer using evaporation are provided to reduce the time and cost for forming a self-assembled monolayer by excluding vacuum equipment. CONSTITUTION: An apparatus for manufacturing a self-assembled monolayer comprises a chamber(110), an upper cover(130), a heating unit(150), and a temperature controller(170). The chamber allows for evaporation of a self-assembled monomolecular material. The upper cover covers the top of the chamber and has a substrate fixing part(131). The heating unit raises the temperature of the chamber to evaporate a self-assembled monomolecular material put in the chamber. The temperature controller controls the heating temperature of the heating unit.