| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing an optical waveguide by which a light propagation path is formed between a substrate and an adherend without using an adhesive layer, the substrate and the adherend are strongly bonded, thus an assembly functioning as an optical waveguide is easily obtained, and to provide an optical waveguide which is made thinner and reliable. SOLUTION: The method of manufacturing the optical waveguide includes: a step in which a bonding film 3 is formed on a first substrate 2 by the plasma polymerization method; a step in which a cladding region (a first region) 320 is irradiated with ultraviolet ray, the clad part which is formed surrounding a core region (a second region) 310 which is formed in a line on a part of the bonding film 3; and a step in which the first substrate 2 and a second substrate 4 are bonded via the bonding film 3 to obtain the optical waveguide 1. The refractive index of the cladding region 320 is reduced by the ultraviolet ray irradiation processing, the difference in the refractive indices is created between the core region 310 and the cladding regions 320, the core region 310 becomes a core 31 while the cladding regions 320 become side clad parts 32. COPYRIGHT: (C)2010,JPO&INPIT |
