| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a nozzle substrate made of silicon of high quality improved in alkali resistance without forming a flaw, a pinhole, or the like in the surface of a liquid protective film. Ž<P>SOLUTION: The nozzle substrate made of silicon has a nozzle hole 11 for ejecting liquid droplets. A dry oxide film 12 is formed from a liquid lead-in side surface 1b of the nozzle hole 11 to an inner wall 11c of the nozzle hole 11, and a Ta<SB>2</SB>O<SB>5</SB>film 13 is laminated on the dry oxide film 12. At this time, the dry oxide film 12 is formed from the liquid lead-in side surface 1b of the nozzle hole 11 to the inner wall 11c of the nozzle hole 11, and a water-repellent film 14 is further formed on a liquid discharge side surface 1a of the nozzle hole 11. A Ta<SB>2</SB>O<SB>5</SB>film 13 continuous from the liquid lead-in side surface 1b of the nozzle hole 11 to an opening 11d of the inner wall 11c of the nozzle hole 11 is laminated on the dry oxide film 12. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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