发明名称 |
ALIGNING APPARATUS, BONDING APPARATUS, LAMINATED SUBSTRATE MANUFACTURING APPARATUS, EXPOSURE APPARATUS AND ALIGNING METHOD |
摘要 |
<p>Alignment operation of an aligning apparatus is shortened. The aligning apparatus for aligning a substrate having an alignment mark is provided with a first aligning section for aligning the substrate with a first reference position, a second aligning section for aligning a substrate holding member with a second reference position prior to holding the substrate, and a position detecting section for detecting the position of the alignment mark of the substrate after holding the substrate by a substrate holding section.</p> |
申请公布号 |
KR20100074126(A) |
申请公布日期 |
2010.07.01 |
申请号 |
KR20107005460 |
申请日期 |
2008.08.12 |
申请人 |
NIKON CORPORATION |
发明人 |
TANAKA YASUAKI;SANADA SATORU |
分类号 |
H01L21/68;H01L21/027;H01L21/50 |
主分类号 |
H01L21/68 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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