| 摘要 |
<P>PROBLEM TO BE SOLVED: To prevent the breakage of a biasing means which biases contact pins provided at a probe card, and to obtain a large current value of a conductive electric signal. Ž<P>SOLUTION: The probe card includes the contact pins into contact with electrodes of an object to be inspected; the biasing means for biasing the contact pins toward electrodes of the object to be inspected; and signal lines continuing to the contact pins and movable with the contact pins. A holder for movably holding the contact pins is especially mounted to a substrate, and a contact pin holding layer for freely holding the contact pins in movement; an electrode layer for forming the signal lines; a gap forming layer for forming a gap which makes the signal lines movable accompanied by the contact pins; and a biasing means housing layer for housing the biasing means are layered and especially formed in the substrate. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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