| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a nozzle substrate, a liquid droplet delivery head, and a liquid droplet delivery device, restraining a liquid droplet protection film formed on a liquid droplet delivery face of the nozzle substrate from being separated or damaged, and enhancing durability of the nozzle substrate against a liquid droplet, and a method of manufacturing those. Ž<P>SOLUTION: This nozzle substrate 1 is formed with a nozzle hole 11 for delivering the liquid droplet while penetrating a silicon substrate 100, and includes the second liquid droplet protection film 14 formed on a liquid droplet delivery face 100a of the silicon substrate 100, and a conductive terminal 13 formed in a liquid droplet delivery face 100a side, and having a withstand voltage lower than that of the second liquid droplet protection film 14. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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