| 发明名称 |
ACID BLOCK FOR HYBRID SILICON DEVICE PROCESSING COMPATIBLE WITH LOW-LOSS WAVEGUIDES |
| 摘要 |
An acid-stop structure for a rib waveguide comprises a fin structure formed between the sidewalls in each rib channel of the rib waveguide, thereby preventing acids and other etchants from flowing down the rib channel and under a die that has been bonded to a wafer.
|
| 申请公布号 |
US2010166360(A1) |
申请公布日期 |
2010.07.01 |
| 申请号 |
US20080346779 |
申请日期 |
2008.12.30 |
| 申请人 |
JONES RICHARD;FANG ALEXANDER W |
发明人 |
JONES RICHARD;FANG ALEXANDER W. |
| 分类号 |
G02B6/12;G02B6/10 |
主分类号 |
G02B6/12 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
