摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a micro-electromechanical system switch that has an electrode passage. <P>SOLUTION: The MEMS switch 10 includes a first part 12 and a second part. When the switch is in an open position (or is in a closed position, depending on switch structure), the second part is displaced to a position not superimposing the first part 12. The MEMS 10 further includes an actuator 16, which moves the first part 12 and the second part and makes these parts contact one another. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |