| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method and a system capable of accurately and effectively bonding a long thin spacer between a pair of substrates. <P>SOLUTION: When the spacer 9 is held by using a hand that is provided with fixed claws 12a, 13a and movable claws 12b, 13b, and in which surfaces 12c, 13c of the movable claws 12b, 13b face a spacer 9, and the surfaces 12c, 13c are arranged tilted with respect to the spacer 9 such that the distance between the surfaces 12c, 13c and the spacer 9 is longer at the end than at the center in the length direction of the spacer 9, the spacer 9 is held with the fixed claws 12a, 13a and the movable claws 12b, 13b such that the holding region is gradually wider from the center of the spacer 9 toward the end; thereby, warp of the spacer 9 in its width direction is corrected. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
