| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve durability of a gas sensor element used for a gas sensor which detects concentration of a specified gas component in a measurement gas containing a lower hydrocarbon in which a carbon number is 6 or less or its compounds. <P>SOLUTION: In a manufacturing process P<SB>1</SB>of a gas sensor element before treatment, such a gas sensor element before treatment 10<SB>BFR</SB>is formed that including a solid electrolyte layer 101 composed of a solid electrolyte material having conductivity toward a specified ion, a reference electrode layer 110 formed on the one surface of the solid electrolyte layer 101, a measuring electrode layer 120 formed on the other surface, and a porous protecting layer 130 which covers the surface of the measuring electrode layer 120. In a saturated hydrocarbon treating process P<SB>2</SB>, heat treatment is performed on the measuring electrode layer 120 under a mixed atmosphere of saturated hydrocarbon and inert gas. In a residual carbon oxidizing process P<SB>3</SB>, heat treatment is performed under an air atmosphere or a mixed atmosphere of oxygen and inert gas. <P>COPYRIGHT: (C)2010,JPO&INPIT |
