| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To machine a machining surface by accurately recognizing ruggedness of the machining surface of a workpiece and irradiating the machining surface with a laser beam of a prescribed spot. <P>SOLUTION: An area image sensor 70 of a camera 7 picks up an image of a state where a beam receiving lens 71 of the camera 7 is moved to an initial position in accordance with a prescribed position of the machining surface W1 of a workpiece W, and an image of the machining surface W1 through galvano mirrors 2a, 2b each time the beam receiving lens 71 is moved thereafter. An arithmetic section 8 comprising a distance sensor 5 together with the camera 7 extracts a maximum output of the area image sensor 70. The arithmetic section 8, detecting an optical path length between the beam receiving lens 71 and the area image sensor 70 when obtaining the maximum output, determines a distance from an fθlens 3 to the machining surface W1 using the optical path length and the focal distance of the beam receiving lens 71. A controller 6, using the measurement of the arithmetic section 8, controls a focus adjusting means 4 so that the machining surface W1 is irradiated with a laser beam of a prescribed spot emitted from a laser beam source 1. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
