发明名称 TRANSFER APPARATUS, TRANSFER SYSTEM, AND TRANSFER METHOD
摘要 PROBLEM TO BE SOLVED: To prevent generation of poor transfer by a simple structure in a transfer apparatus of transfer a fine transfer pattern formed in a mold to an article to be molded. SOLUTION: A transfer apparatus 3 transfering a fine transfer pattern formed in a mold M to an article to be molded W is equipped with an installing material 13 equipped with an installing surface 33 comprising a smooth surface to an upper direction slantly having a pre-determined area, to which a provisional construction material TA is contacted, a supporting material 27 to prevent falling down the provisional construction material TA by gravitation under connecting to a part of the provisional construction material TA upon setting forth the provisional construction material TA under surface-adhesion to the installing surface 33, and a pressing material 15 by inserting the provisional construction material TA set forth on the installing material 13 under cooperating movement of the installing material 13, which is equipped with a pressing surface 45 to be surface-adhered to another surface of the provisional construction material TA, the pressing surface having a pre-determined area and being positioned oppositely against the installing surface 33 of the installing material 13. COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2010143187(A) 申请公布日期 2010.07.01
申请号 JP20080325750 申请日期 2008.12.22
申请人 TOSHIBA MACH CO LTD 发明人 KOKUBO MITSUNORI;ITANI SHINYA;ISHIBASHI KENTARO;FUJIWARA SHIGERU;SUGIURA HIROYOSHI
分类号 B29C59/02;H01L21/027 主分类号 B29C59/02
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