摘要 |
<P>PROBLEM TO BE SOLVED: To provide a small-sized magnetic sensor having a small power consumption. Ž<P>SOLUTION: When a magnetic field is applied to a magnetic sensor element 10, a magnetostrictive material plate 2 is elongated, or shrunk when a magnetostriction constant is minus, to thereby generate a strain in a piezoelectric body flat plate 3, and an interval S between comb teeth 41A, 41B in a propagation direction of an elastic surface wave of an SAW (Surface Acoustic Wave) element 1 is changed, and a resonance frequency f of the SAW element 1 is changed. Consequently, a change of the magnetic field is converted into a change of a frequency, and detection of the change of the magnetic field becomes possible. The SAW element 1 is constituted by forming an electrode on the piezoelectric body flat plate 3, and has a small size, and can reduce a power consumption. Further, the magnetostrictive material plate 2 can be miniaturized corresponding to the SAW element 1. Consequently, the small-sized magnetic sensor element 10 having a small power consumption can be obtained. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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