INTEGRATED CIRCUIT WITH SPURRIOUS ACOUSTIC MODE SUPPRESSION AND MEHTOD OF MANUFACTURE THEREOF

摘要

An integrated circuit (IC) apparatus includes a substrate having opposed first and second major sides and one or more edges defining an outer periphery of the substrate. The substrate may be a semiconductor material. The IC apparatus may further include one or more transducers situated on the first major side of the substrate; and an attenuation pattern formed in at least one of the second major side and one or more of the edges of the substrate.