| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve an estimating accuracy of a polishing rate by using information of a temperature for each of prescribed plurality of time ranges during a polishing operation as the information of the temperature of a polishing part used for estimating the polishing rate. <P>SOLUTION: A polishing rate estimating part K is provided for estimating the polishing rate by using the information of the temperature of the polishing part during the polishing operation and information of a prescribed physical quantity having a relation to the polishing rate except the temperature. The information of the temperature indicates temperature information of the polishing part for each of the time ranges based on the temperatures of the polishing part respectively detected within at least two different prescribed time ranges during the polishing operation. <P>COPYRIGHT: (C)2010,JPO&INPIT |
