| 摘要 |
PROBLEM TO BE SOLVED: To provide a measuring method for measuring highly accurately an aspheric shape as a surface to be tested. SOLUTION: This measuring method for illuminating the surface to be tested having an aspheric surface by using a light flux that form spherical waves to measure the shape of the surface to be tested, has: a first detection step wherein the surface to be tested is driven to the direction of an aspheric axis with the center of curvature of the spherical waves on the aspheric axis of the aspheric surface, and positioned successively on a plurality of positions, and an interference pattern between a light flux from the surface to be tested and a light flux from a reference surface being detected on each of the plurality of positions; and a second detection step wherein the surface to be tested is positioned on each of a plurality of shifted positions determined by being shifted as much as a known quantity from each of the plurality of positions toward the vertical direction of the aspheric axis, and an interference pattern between the light flux from the surface to be tested and the light flux from the reference surface is detected on each of the plurality of shifted positions. COPYRIGHT: (C)2010,JPO&INPIT
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