发明名称 COMPOUND SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF THE SAME
摘要 An i-GaN layer (electron transit layer), an n-GaN layer (compound semiconductor layer) formed over the i-GaN layer (electron transit layer), and a source electrode, a drain electrode and a gate electrode formed over the n-GaN layer (compound semiconductor layer) are provided. A recess portion is formed inside an area between the source electrode and the drain electrode of the n-GaN layer (compound semiconductor layer) and at a portion separating from the gate electrode.
申请公布号 US2010163928(A1) 申请公布日期 2010.07.01
申请号 US20090618384 申请日期 2009.11.13
申请人 FUJITSU LIMITED 发明人 IMADA TADAHIRO;YAMADA ATSUSHI
分类号 H01L29/778;H01L21/335 主分类号 H01L29/778
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