MICRO-ELECTROMECHANICAL SYSTEM SWITCH

摘要

PURPOSE: An MEMS(Micro Electromechanical System) switch is provided to obtain a high standoff voltage and a low pull-in voltage by removing an overlap region between two beams. CONSTITUTION: An electric current is transmitted through an electrical path. The electrical path comprises a first part(12) and a second part. The first part is located on the surface of an actuator(16). An insulating layer(17) is interposed between the first part and the actuator. The second part is arranged on an offset position of the first part to form the overlap region. An actuator contacts the first part with the second part by electrostatic force.