| 摘要 |
<p>PURPOSE: A position sensing device for a transfer robot of a semiconductor manufacturing system and a method thereof are provided to simply secure a replacement time of the transfer robot by accurately detecting the position of the transfer robot . CONSTITUTION: A sensor unit(130) changes the current position of a transporting robot to an electrical signal to and outputs it. A sensor signal processor(140) outputs the electric signal corresponding to an error between the current position of the transporting robot and a predetermined reference location. A robot interlock unit(150) bypasses the electric signal corresponding to the error. The robot interlock unit outputs a drive stop signal when the error is higher than the reference value. A display unit(180) displays the error. A transfer robot operating unit(160) stops the drive of the transporting robot with the drive stop signal.</p> |
