发明名称 SEMICONDUCTOR DEVICE FOR IMPROVING CHANNEL MOBILITY
摘要 A semiconductor device includes a substrate, a gate electrode formed on the substrate, a source region and a drain region formed in the substrate, the source region and the drain region formed located on the both side of the gate electrode, a first insulating film formed on the substrate, the first insulating film for generating a stress in a channel region under the gate electrode, a contact formed on the source region and the drain region, and the contact formed so that an amount of the first insulating film formed on the source region is larger than an amount of the first insulating film formed on the drain region.
申请公布号 US2010164010(A1) 申请公布日期 2010.07.01
申请号 US20100704677 申请日期 2010.02.12
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 WATANABE RYOTA;KOMODA TAIKI;OISHI AMANE;OKAYAMA YASUNORI
分类号 H01L27/092 主分类号 H01L27/092
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