A method and apparatus for improving a thin film scribing procedure is presented. Embodiments of the invention include a method and apparatus for determining a scribe setting for removal of an absorber layer of a photovoltaic device that improves contact resistance between a back contact layer and a front contact layer of the device.
申请公布号
WO2010033448(A3)
申请公布日期
2010.07.01
申请号
WO2009US56787
申请日期
2009.09.14
申请人
APPLIED MATERIALS, INC.;MEI, FANG;TANNER, DAVID;SU, JEFF