发明名称 IMPROVED THIN FILM SCRIBE PROCESS
摘要 A method and apparatus for improving a thin film scribing procedure is presented. Embodiments of the invention include a method and apparatus for determining a scribe setting for removal of an absorber layer of a photovoltaic device that improves contact resistance between a back contact layer and a front contact layer of the device.
申请公布号 WO2010033448(A3) 申请公布日期 2010.07.01
申请号 WO2009US56787 申请日期 2009.09.14
申请人 APPLIED MATERIALS, INC.;MEI, FANG;TANNER, DAVID;SU, JEFF 发明人 MEI, FANG;TANNER, DAVID;SU, JEFF
分类号 H01L31/042;H01L21/78 主分类号 H01L31/042
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