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发明名称
Vorrichtung zum kontinuierlichen Beschichten eines bandförmigen Substrates
摘要
申请公布号
DE502007003847(D1)
申请公布日期
2010.07.01
申请号
DE200750003847T
申请日期
2007.04.03
申请人
APPLIED MATERIALS INC.
发明人
MULTRUS, ERWIN
分类号
C23C14/04;C23C14/56
主分类号
C23C14/04
代理机构
代理人
主权项
地址
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