发明名称 VERIFICATION METHOD FOR DATA PROCESSING ON DRAWING DATA, AND DRAWING DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide a verification method for data processing which is fast and highly reliable. <P>SOLUTION: The verification method for the data processing on drawing data includes: inputting layout data in which a plurality of cells comprising at least one figure are defined in a chip area; extracting cells, expected to be disposed inside in each of a plurality of processing areas for decentralized processing on the layout data, among the plurality of cells for the each processing area according to position relation based upon a first reference position; extracting cells, expected to be disposed in each of verification areas set at identical positions in the plurality of processing areas corresponding to the plurality of processing areas respectively, among the plurality of cells for the each verification area according to position relation based upon a second reference position different from the first reference position; comparing positions of the corresponding extracted cells between the processing areas and verification areas corresponding to the processing areas by the processing areas to determine whether the positions are identical; and outputting comparison results. <P>COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2010147100(A) 申请公布日期 2010.07.01
申请号 JP20080320031 申请日期 2008.12.16
申请人 NUFLARE TECHNOLOGY INC 发明人 ANPO AKIHITO;HIGURE HITOSHI
分类号 H01L21/027;G03F7/20 主分类号 H01L21/027
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