| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric vibrator whose electromechanical coupling coefficient has been improved, and which uses flexural vibration, and to provide a vibrating gyroscope device for acquiring stable sensitivity. <P>SOLUTION: The vibrating gyroscope device 1 includes a piezoelectric substrate 3, and an upper surface electrode 2 and an underside electrode 4, and vibrates according to the potential difference between the upper surface electrode 2 and the undersurface electrode 4 in the normal line direction of a major face. The undersurface electrode 4 includes an electrode thickness different from a thickness value at which the electromechanical coupling coefficient becomes a lower limit extreme value. Here, a frequency signal is applied to the upper surface electrode 2, and the undersurface electrode 4 is connected to a reference potential. The electromechanical coupling coefficient of this vibrating gyroscope device changes by changing the thickness of the undersurface electrode 4 and displays the lower limit extreme value of the electromechanical coupling coefficient. The vibrating gyroscope device includes a characteristic wherein if the thickness of the undersurface driving electrode deviates from the value at which the electromechanical coupling coefficient becomes the lower limit extreme value, the electromechanical coupling coefficient steeply rises up to a value to be clipped. <P>COPYRIGHT: (C)2010,JPO&INPIT |
