| 摘要 |
PROBLEM TO BE SOLVED: To suppress the intrusion of the foreign matters of dust or chemical gas, and to improve the safety with respect to N2 gas, and to shorten the substitution time with the N2 gas, when replacing the inside of an FOUP by the N2 gas in an N2 purge system for the FOUP. SOLUTION: A method has a step of pressure-filling the N2 gas 21 inside the FOUP 1, and a step of forcibly sucking a residual gas 25 in the FOUP 1 from another breath filter unit 4. The inside of the FOUP 1 is always maintained at the positive pressure state with respect to the outside air. The intrusion of dust or chemical gas into the FOUP 1 from outside is prevented during the replacement of the N2 gas in the FOUP 1. Furthermore, an increase in the pressure in the FOUP 1 is kept constant during replacement of the N2 gas; the N2 gas flow amount leaking from the gap is also kept constant down to a trace amount; and the substitution time of the N2 gas inside the FOUP 1 is shortened, by increasing the supplied amount of the N2 gas 21. COPYRIGHT: (C)2010,JPO&INPIT |
