| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an electrostatic actuator having a fixing sheet of a four-phase electrode pattern, which needs only one face wiring, has a large and uniform electrostatic force, and is easy to be manufactured, and also to provide a manufacturing method therefor. Ž<P>SOLUTION: The electrostatic actuator is equipped with: a first sheet having a specific two-phase electrode pattern on one face; a second sheet having the remaining two-phase electrode pattern on one face; an insulating layer for preventing the electrode patterns different in phase from being shorted when the face of the first electrode pattern and the face of the second electrode pattern are put on; a fixing sheet including an adhesion layer for adhering the first and second sheets; and a moving sheet disposed opposite the fixed sheet, and movable through an electrostatic force working between the fixing sheet and it. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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