| 摘要 |
PROBLEM TO BE SOLVED: To approximately simultaneously detect and measure the inclination of a measuring surface of an object to be inspected to a horizontal surface and the eccentricity of a rotating object to be inspected to a center of rotation when the object to be inspected is a rotating object to be inspected. SOLUTION: An optical system 13 for inclination measurement for directing luminous flux from a laser light source 1 to a rotating object to be inspected D, detecting reflected light from its measuring surface d1 by a telecentric object lens 7, and performing projection to a light-receiving part 11 by an object lens 10 is formed. An optical system 15 for microscopes for detecting an index previously applied to the measuring surface d1 of the object to be inspected by the telecentric object lens 7 and performing projection to the light-receiving part 11 by the object lens 10 is formed. Both optical systems 13 and 15 are combined to project images detected by each of the optical systems to the common light-receiving part 11, to display them on a display part C, and to perform measurements. COPYRIGHT: (C)2010,JPO&INPIT
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