| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a cantilever that includes a lever having a low spring constant, and a high-durability probe. Ž<P>SOLUTION: The cantilever has a support part 2A made of single-crystal silicon, a beam part 5 comprising a silicon nitride film 13 and a substrate part 2B formed on the free-end side of the beam part integrally with the silicon nitride film 13 and made of single-crystal silicon, and a probe 4 formed on the substrate part 2B and made of polycrystal diamond. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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