| 摘要 |
<P>PROBLEM TO BE SOLVED: To measure a tilt angle or the like of a hole formed at a measuring object with high accuracy. Ž<P>SOLUTION: A light source 106 outputs light 150 for measurement which is composed of a plurality of parallel light beams having a linear section and disposed at prescribed intervals. Light detecting parts 111 and 114 detect the light 150 for measurement reflected in the peripheral area of the hole 132 of the measuring object 130. A control part 126 determines a perpendicular bisector of each light beam using position coordinates of points of intersection of the light beams detected by the light detecting parts 111 and 114 and the peripheral edge of the hole 132, and calculates the tilt angle of the hole 132 using the position coordinates of the points of intersection of a plurality of light beams not intersecting the hole 132 and of the perpendicular bisectors and the known intervals of the light beams. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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