| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a plasma processor capable of preventing reaction products from sticking on an optical window of a view port for collecting plasma light in a chamber and capable of continuously collecting the light in real time, in the plasma processor which performs plasma processes such as etching, CVD, and ashing. <P>SOLUTION: The plasma processor includes: a plurality of shielding plates each of which has an opening portion and are mutually disposed so that part of light from the reaction chamber is projected on the optical window on a reaction chamber side than the optical widow; and a rotation portion for rotating the plurality of shielding plates at the same speed in the same direction. The shielding plate can be provided with a raised portion which extends in a radial direction in a plane, on the reaction chamber side. <P>COPYRIGHT: (C)2010,JPO&INPIT |
