| 摘要 |
<P>PROBLEM TO BE SOLVED: To carry a substrate at a high speed, while restraining vibration and deformation of the substrate. Ž<P>SOLUTION: This substrate handling system 1 has a carrying passage 20 for carrying a glass substrate G. The carrying passage 20 has a substrate floating device 25 for floatingly holding the glass substrate G on the carrying passage 20 by blowout and suction of air, and a driving mechanism 24 for moving the glass substrate G by holding the glass substrate G, and carries the glass substrate G in the carrying direction X while floatingly holding the glass substrate. This substrate handling system 1 can surely restrain damaging of a main surface of the glass substrate G even if the glass substrate G is carried at a high speed, and can put this glass substrate in a state of following the carrying passage 20 even if there is deformation in the glass substrate G, by restraining the vibration of the glass substrate G by high holding rigidity. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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