发明名称 Implant process for blocked salicide poly resistor and structures formed thereby
摘要 Methods and associated structures of forming a microelectronic device are described. Those methods may include implanting an exposed p type silicon portion of a substrate with a carbon species, wherein endcap regions of a blocked salicide resistor and a p type structure that are both disposed on the exposed p type silicon portion of the substrate are implanted with the carbon species.
申请公布号 US2010164001(A1) 申请公布日期 2010.07.01
申请号 US20080319015 申请日期 2008.12.30
申请人 PARK JOODONG;JAN CHIA-HONG;MCGILL LISA M 发明人 PARK JOODONG;JAN CHIA-HONG;MCGILL LISA M.
分类号 H01L27/092;H01L21/22;H01L21/8238 主分类号 H01L27/092
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