TILT ADJUSTING METHOD AND TILT ADJUSTING DEVICE, AND DEVICE ADJUSTED BY THE TILT ADJUSTING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a technique for tilt adjustment capable of easily adjusting the relative tilt between objects disposed opposite each other with high precision.

SOLUTION: On a substrate 55, an electrode as a first detection portion is formed and on a substrate 56, an electrode as a second detection portion is formed at a position where it is paired with the electrode of the substrate 55. Then the substrate 55 and substrate 56 are held at a holding portion 29 of a stage portion 15 and a holding portion 44 of a head portion 39 respectively, and a detection portion 50 detects electrostatic capacity between the pair of electrodes of the substrate 55 and substrate 56. Then an X-Y stage control portion 52 moves an X-Y stage mechanism 11 so that the detected electrostatic capacity reaches a predetermined value, thereby adjusting the relative tilt between the substrate 55 and substrate 56.

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