| 摘要 |
An illumination apparatus includes a light source (1), a first integrator (11) into which light from the light source (1) enters, and a second integrator (33) into which light exiting from the first integrator (11) enters. Accordingly, the aperture shape of the first integrator (11) can be optimally designed, so that the light utilization efficiency can be increased. Furthermore, even when the length of the first integrator (11) is reduced, a deficiency in the light uniformity due to the first integrator (11) is compensated for by the second integrator (33), so that high uniformity can be secured at the surface to be illuminated.
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