| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and an apparatus for applying a coating liquid, in each of which the time to set the amount of the coating liquid, which is to be discharged and is required for all of coating heads of the apparatus for applying the coating liquid, is shortened to improve the productivity. SOLUTION: The method for applying the coating liquid to a substrate by discharging the coating liquid from respective nozzles of a plurality of the coating heads 11 comprises a step of using a voltage coefficient k of each of the coating heads 11, the coefficient being used when the amount of the coating liquid to be discharged is set at the last time, when the amount of the coating liquid to be discharged from each of the coating heads 11 is set at the next time. COPYRIGHT: (C)2010,JPO&INPIT |
