| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a liquid jet head capable of reducing the crack of a ceramic vibration plate, thereby improving durability and reliability, and to provide a liquid jet device and an actuator device. <P>SOLUTION: The liquid jet head includes: a pressure generating chamber 12 communicated with a nozzle opening; a silicon oxide film 50 provided on one surface side of the pressure generating chamber 12; the ceramic vibration plate 55 provided on the side opposite to the pressure generating chamber 12 of the silicon oxide film 50; and a pressure generating element 300 provided above the ceramic vibration plate 55 and generating a pressure change in the pressure generating chamber. A metal film 56 made of a precious metal material is provided between the silicon oxide film 50 and the ceramic vibration plate 55. <P>COPYRIGHT: (C)2010,JPO&INPIT |
