| 摘要 |
PROBLEM TO BE SOLVED: To provide a coating film inspecting apparatus for detecting the defectiveness of the coating film produced on a film in manufacture. SOLUTION: The coating film inspecting apparatus 10 includes a light source 24 emitting ultraviolet rays (wavelength: 100-400 nm) and a light detecting element 26 detecting ultraviolet rays. Since the absorption or the like of ultraviolet rays is larger than that of visible light or infrared rays, the reduction of the ultraviolet rays detected by the light detecting element 26 becomes large. This property is utilized to detect the protrusion of the coating film 16 by the reduction of the detection quantity of ultraviolet rays. COPYRIGHT: (C)2010,JPO&INPIT |
