Thermoacoustic module, thermoacoustic device, and method for making the same

摘要

A thermoacoustic module includes a substrate, a sound wave generator, at least one first electrode and at least one second electrode. The substrate has a top surface, and the top surface defines at least one recess. The sound wave generator is located on the top surface of the substrate and includes at least one first region suspended above the at least one recess and at least one second region being in contact with the top surface of the substrate. The at least one first electrode and at least one second electrode are coupled to the sound wave generator.