| 摘要 |
A short wavelength light source includes a wavelength conversion element having an incident surface, on which a fundamental wave is incident, and an output surface, from which a harmonic wave is outputted, the wavelength conversion element being provided for converting the fundamental wave into the harmonic wave; and a holder for holding said wavelength conversion element, wherein the wavelength conversion element has a specific region on the light output side, which is arranged so as to suppress variations in phase matching condition between the fundamental wave and the harmonic wave resulting from heat generated by absorbing the harmonic wave during a wavelength conversion.
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