发明名称 METHOD FOR FABRICATING A JUNCTION FIELD EFFECT TRANSISTOR AND THE JUNCTION FIELD EFFECT TRANSISTOR ITSELF
摘要 A method for fabricating a junction field effect transistor includes the steps of the type I semiconductor at the base thereof being doped with the type II semiconductor to form a type II well with a hole; then, a drive-in process of the type II semiconductor is performed to allow the implant dosage of the type II well getting less gradually from the surroundings of the hole toward the center of the hole; and finally, the gate, the source and the drain of the junction field effect transistor being formed successively on the type II well. The implant dosage at the hole, which is acted as a channel, is determined in accordance with the preset size of the hole during the type II well being formed such that it is capable being compatible with the output voltages of different junction field effect transistors to achieve the purpose of the adjustment of the pinch-off voltage of the junction field effect transistor without the need of the mask and the manufacturing process.
申请公布号 US2010163934(A1) 申请公布日期 2010.07.01
申请号 US20090418560 申请日期 2009.04.03
申请人 RICHTEK TECHNOLOGY CORP. 发明人 HUANG CHIH-FENG
分类号 H01L29/808;H01L21/337 主分类号 H01L29/808
代理机构 代理人
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