COMPOSITE SUBSTRATE AND METHOD FOR FORMING METAL PATTERN

摘要

A composite substrate 10 is a composite substrate in which a piezoelectric substrate 11 that is transparent to light used for photolithography and a supporting substrate 12 for supporting the piezoelectric substrate 11 are bonded together via an organic adhesive layer 13. At least one of the supporting substrate 12 and the organic adhesive layer 13 of the composite substrate 10 can absorb light used for photolithography.