| 摘要 |
<p>Disclosed is a method for manufacturing highly pure polycrystalline silicon by reducing chlorosilane with metallic zinc whereby a large amount of polycrystalline silicon can be produced continuously and stably while zinc chloride is processed without using hydrolysis of the zinc chloride. Further disclosed is a reaction furnace used for said method. Chlorosilane and metallic zinc are reacted, producing polycrystalline silicon. The polycrystalline silicon and zinc chloride are separated from the reaction product obtained by reacting the chlorosilane and the metallic zinc. Metallic zinc and magnesium chloride are produced by reacting the separated zinc chloride with metallic magnesium. The metallic zinc that is produced is used in a reaction with chlorosilane. Chlorine and metallic magnesium are produced by electrolysis of the magnesium chloride that is produced. The chlorine that is produced is used for the production of chlorosilane. The metallic magnesium that is produced is used in a reaction with the zinc chloride that has been separated.</p> |
